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Nanopatterning on rough surfaces using optically trapped microspheres Y.-C. Tsai, R. Fardel, and C. B. Arnolda
 

Summary: Nanopatterning on rough surfaces using optically trapped microspheres
Y.-C. Tsai, R. Fardel, and C. B. Arnolda
Department of Mechanical and Aerospace Engineering, Princeton Institute for the Science and Technology
of Materials, Princeton University, Princeton, New Jersey 08544, USA
Received 1 April 2011; accepted 18 May 2011; published online 9 June 2011
While nanofabricated structures find an increasingly large number of applications, few techniques
are able to pattern rough or uneven surfaces, or surfaces with pre-existing structure. In this letter
we show that optical trap assisted nanopatterning OTAN , a near-field laser based technique, is able
to produce nanoscale features on surfaces with large roughness but without the need for focus
adjustment. Patterning on model surfaces of polyimide with vertical steps greater than 0.5 m
shows a high degree of uniformity, demonstrating that OTAN is a suitable technique to pattern
nontraditional surfaces for emerging technologies. 2011 American Institute of Physics.
doi:10.1063/1.3598427
The fabrication of structures smaller than 100 nm is re-
quired by an increasing number of applications in optics,1
photonics,2
microfluidics,3
biology,4
and other emerging ar-
eas. In such cases, nontraditional substrates such as soft or

  

Source: Arnold, Craig B. - Department of Mechanical and Aerospace Engineering, Princeton University

 

Collections: Engineering; Materials Science