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Z-AXIS OPTOMECHANICAL ACCELEROMETER D.N. Hutchison and S.A. Bhave
 

Summary: Z-AXIS OPTOMECHANICAL ACCELEROMETER
D.N. Hutchison and S.A. Bhave
OxideMEMS Laboratory, Cornell University, Ithaca NY, USA
ABSTRACT
We demonstrate a z-axis accelerometer which uses
waveguided light to sense proof mass displacement. The
accelerometer consists of two stacked rings (one fixed and
one suspended above it) forming an optical ring resonator.
As the upper ring moves due to z-axis acceleration, the
effective refractive index changes, changing the optical
path length and therefore the resonant frequency of the
optical mode. The optical transmission changes with
acceleration when the laser is biased on the side of the
optical resonance. This silicon nitride "Cavity-enhanced
OptoMechanical Accelerometer" (COMA) has a
sensitivity of 22 percent-per-g optical modulation for our
highest optical quality factor ( ) devices.
INTRODUCTION
Motivation
Optics has been shown to yield extremely sensitive

  

Source: Afshari, Ehsan - School of Electrical and Computer Engineering, Cornell University

 

Collections: Engineering