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Summary: NANO-ELECTROMECHANICAL ZERO-DIMENSIONAL FREESTANDING
NANOGAP ACTUATOR
Jun Hyun Han1
, Norimasa Yoshimizu2
, Tiffany Cheng2
, Michael Ziwisky1
, Sunil A. Bhave2
, Amit Lal2
,
and Chung Hoon Lee1
1
Marquette University, Milwaukee, Wisconsin, USA
2
Cornell University, Ithaca, New York, USA
ABSTRACT
Micromachined free standing nanogap with metal
electrodes is presented. The gap size is as small as 17 nm,
and can be reduced further with electrostatic or piezoelectric
actuation. The nanoscale gap is fabricated by industrial
standard optical lithography and anisotropic wet chemical Si
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