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Summary: FREQUENCY SCALING AND TRANSDUCER EFFICIENCY IN INTERNAL DIELECTRICALLY
TRANSDUCED SILICON BAR RESONATORS
Dana Weinstein1
, Sunil A. Bhave1
, Shinya Morita2
, Shun Mitarai2
, Koichi Ikeda2
1
OxideMEMS Lab, Cornell University, Ithaca, New York, USA
2
Sony Corporation, Core Device Development Group, Kanagawa, Japan
ABSTRACT
In this paper, we present experimental results of
frequency scaling and transducer optimization in internal
dielectrically transduced silicon bar resonators. We show
that selective positioning of the dielectric transducers
inside the resonator can preferentially excite targeted
harmonics while suppressing undesired modes.
Furthermore, measurements across multiple resonators
show lower motional impedance as resonant frequency
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