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A monolithic radiation-pressure driven, low phase noise silicon nitride
 

Summary: A monolithic radiation-pressure driven,
low phase noise silicon nitride
opto-mechanical oscillator
Siddharth Tallur,* Suresh Sridaran and Sunil A. Bhave
OxideMEMS Laboratory, School of Electrical and Computer Engineering, Cornell University,
Ithaca, NY, 14853, USA
*sgt28@cornell.edu
Abstract: Cavity opto-mechanics enabled radiation pressure (RP) driven
oscillators shown in the past offer an all optical Radio Frequency (RF)
source without the need for external electrical feedback. However these
oscillators require external tapered fiber or prism coupling and non-standard
fabrication processes. In this work, we present a CMOS compatible fabrica-
tion process to design high optical quality factor opto-mechanical resonators
in silicon nitride. The ring resonators designed in this process demonstrate
low phase noise RP driven oscillations. Using integrated grating couplers
and waveguide to couple light to the micro-resonator eliminates 1/f3 and
other higher order phase noise slopes at close-to-carrier frequencies present
in previous demonstrations. We present an RP driven opto-mechanical
oscillator (OMO) operating at 41.97MHz with a signal power of -11dBm
and phase noise of -85dBc/Hz at 1kHz offset with only 1/f2 noise down to

  

Source: Afshari, Ehsan - School of Electrical and Computer Engineering, Cornell University

 

Collections: Engineering