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SIMULTANEOUS DUAL-MODE EXCITATION OF PIEZO-ON-SILICON MICROMECHANICAL OSCILLATOR FOR SELF-TEMPERATURE SENSING
 

Summary: SIMULTANEOUS DUAL-MODE EXCITATION OF PIEZO-ON-SILICON
MICROMECHANICAL OSCILLATOR FOR SELF-TEMPERATURE SENSING
M.J. Dalal, J.L. Fu, and F. Ayazi
Georgia Institute of Technology, Atlanta, Georgia, USA
ABSTRACT
This paper demonstrates a dual-mode (DM) oscillator
which simultaneously excites the fundamental and third-
order modes of a micromachined, piezo-on-silicon bulk
acoustic wave (BAW) resonator for real-time self-
temperature measurement. By concurrently measuring the
temperature coefficient of frequency (TCF) at 30 MHz (f1)
and 87 MHz (f3), a beat frequency (fb) with TCF of 162
ppm/o
C is extracted. Phase noise measurements of the
third-order harmonic before and after DM excitation show
signal degradation close to carrier and improvement far
from carrier. This is attributed to the loaded Q of both
modes and the introduction of spurious modes near
resonance. In addition, the beat frequency linearity is
compared over several devices with varying Q, confirming

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering