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Complex Oscillations and Chaos in Electrostatic Microelectromechanical Systems under Superharmonic Excitations
 

Summary: Complex Oscillations and Chaos in Electrostatic Microelectromechanical Systems
under Superharmonic Excitations
Sudipto K. De and N. R. Aluru*
Department of Mechanical and Industrial Engineering Beckman Institute for Advanced Science and Technology,
University of Illinois at Urbana-Champaign, Urbana, Illinois, USA
(Received 2 November 2004; published 26 May 2005)
In this Letter, the formation of complex oscillations of the type 2n M oscillations per period at the Mth
superharmonic excitation is reported for electrostatic microelectromechanical systems. A dc bias (beyond
``dc symmetry breaking'') and an ac signal (at the Mth superharmonic frequency) with an amplitude
around ``ac symmetry breaking'' gives rise to M oscillations per period or period M response. On
increasing the ac voltage, a cascade of period doubling bifurcations take place giving rise to 2n M
oscillations per period. An interesting chaotic transition (1-band and 2-band chaos) is observed during the
first period doubling bifurcation. The nonlinear nature of the electrostatic force is shown to be responsible
for the reported observations.
DOI: 10.1103/PhysRevLett.94.204101 PACS numbers: 85.85.+j, 05.45.Pq
Nonlinearities in microelectromechanical systems
(MEMS) can arise from various sources such as spring
and damping mechanisms [1], resistive, inductive, and
capacitive circuit elements [2], and surface, fluid, electro-
static, and magnetic forces [3]. Nonlinear dynamic phe-

  

Source: Aluru, Narayana R. - Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign

 

Collections: Engineering; Materials Science