Home

About

Advanced Search

Browse by Discipline

Scientific Societies

E-print Alerts

Add E-prints

E-print Network
FAQHELPSITE MAPCONTACT US


  Advanced Search  

 
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 14, NO. 2, APRIL 2005 313 Accurate Simulation of RF MEMS VCO
 

Summary: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 14, NO. 2, APRIL 2005 313
Accurate Simulation of RF MEMS VCO
Performance Including Phase Noise
Manas Behera, Volodymyr Kratyuk, Sudipto K. De, Narayan R. Aluru, Member, IEEE, Yutao Hu, and
Kartikeya Mayaram, Fellow, IEEE
Abstract--A new coupled circuit and electrostatic/mechanical
simulator (COSMO) is presented for the design of low phase noise
radio frequency (RF) microelectromechanical systems (MEMS)
voltage-controlled oscillators (VCOs). The numerical solution of
device level equations is used to accurately compute the capaci-
tance of a MEMS capacitor. This coupled with a circuit simulator
facilitates the simulation of circuits incorporating MEMS capaci-
tors. In addition, the noise from the MEMS capacitor is combined
with a nonlinear circuit-level noise analysis to determine the phase
noise of RF MEMS VCO. Simulations of two different MEMS
VCO architectures show good agreement with experimentally
observed behavior. [1230]
Index Terms--Circuit simulation, coupled circuit and device
simulation, electrostatic/mechanical simulator, microelectrome-
chanical systems (MEMS) capacitor, microelectromechanical

  

Source: Aluru, Narayana R. - Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign

 

Collections: Engineering; Materials Science