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Summary: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 14, NO. 2, APRIL 2005 313
Accurate Simulation of RF MEMS VCO
Performance Including Phase Noise
Manas Behera, Volodymyr Kratyuk, Sudipto K. De, Narayan R. Aluru, Member, IEEE, Yutao Hu, and
Kartikeya Mayaram, Fellow, IEEE
Abstract--A new coupled circuit and electrostatic/mechanical
simulator (COSMO) is presented for the design of low phase noise
radio frequency (RF) microelectromechanical systems (MEMS)
voltage-controlled oscillators (VCOs). The numerical solution of
device level equations is used to accurately compute the capaci-
tance of a MEMS capacitor. This coupled with a circuit simulator
facilitates the simulation of circuits incorporating MEMS capaci-
tors. In addition, the noise from the MEMS capacitor is combined
with a nonlinear circuit-level noise analysis to determine the phase
noise of RF MEMS VCO. Simulations of two different MEMS
VCO architectures show good agreement with experimentally
observed behavior. [1230]
Index Terms--Circuit simulation, coupled circuit and device
simulation, electrostatic/mechanical simulator, microelectrome-
chanical systems (MEMS) capacitor, microelectromechanical
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