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Electronic structure of high-k transition metal oxides and their silicate and aluminate alloys
 

Summary: Electronic structure of high-k transition metal oxides and their silicate
and aluminate alloys
G. Lucovsky, Y. Zhang, G. B. Rayner, Jr., G. Appel, and H. Ade
Department of Physics, North Carolina State University, Raleigh, North Carolina 27695-8202
J. L. Whitten
Department of Chemistry, North Carolina State University, Raleigh, North Carolina 27695-8202
Received 31 January 2002; accepted 13 May 2002
This article addresses differences between the electronic structure of: i alternative high-k transition
metal TM rare earth dielectrics and ii SiO2 and Si oxynitride alloys by presenting a systematic
x-ray absorption spectroscopy study of transitions between TM n p-core states and TM metal n
1 dÃ
and n 2 sÃ
antibonding/conduction band states n 2, 3, and 4 that is complemented by
studies of O atom K1 edge absorption spectra. Ab initio calculations based on small clusters
establish the localization of the n 1 dÃ
states on the TM metals. Ab initio electronic structure
calculations are also used to interpret other aspects of the optical, ultraviolet, x-ray, and electron
spectroscopies, and also provide a basis for interpretation of electrical results, thereby narrowing the
field of possible replacement dielectrics for advanced semiconductor devices. © 2002 American
Vacuum Society. DOI: 10.1116/1.1493787

  

Source: Ade, Harald W.- Department of Physics, North Carolina State University

 

Collections: Physics