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Summary: Computational Aspects of Modeling of Nanoelectromechanical Systems
(NEMS) for Biosensing Applications
S. Krylov(a)
, B. Ilic(b), L.Bellan(b)
, M. Kondratovich(b)
, H. Craighead(b)
(a)
School of Mechanical Engineering, Faculty of Engineering, Tel Aviv University
(b)
School of Applied and Engineering Physics, Nanobiotechnology Center
and Cornell Nanoscale Facility, Cornell University, Ithaca, NY
In recent years, the emerging field of nanoelectromechanical systems (NEMS) has demonstrated a
number of significant scientific advancements. The need for this methodology is driven by the
development of biosensors based on an altering of resonant frequency due to adsorption of target analytes
to nanomechanical structures. NEMS devices, made by lithographic techniques, are integrated with
motion transduction while the types of materials that can be structured in this way have low mechanical
losses providing a high mechanical quality factor of the oscillators and therefore well-defined resonant
frequencies. The very specific resonant frequencies coupled with the low mass of the oscillator enable the
detection of small, up to attogram, amounts of additional bound mass.
Deeper understanding of the unique dynamics that underpin the actuation and sensing mechanisms
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