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JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 11, NO. 3, JUNE 2002 245 A Lagrangian Approach for Electrostatic Analysis of
 

Summary: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 11, NO. 3, JUNE 2002 245
A Lagrangian Approach for Electrostatic Analysis of
Deformable Conductors
Gang Li and N. R. Aluru, Member, IEEE
Abstract--Deformable conductors are frequently encounted in
microelectromechanical systems (MEMS). For example, in elec-
trostatic MEMS, microstructures undergo deformations because
of electrostatic forces caused by applied potentials. Computational
analysis of electrostatic MEMS requires an electrostatic analysis to
compute the electrostatic forces acting on micromechanical struc-
tures and a mechanical analysis to compute the deformation of
micromechanical structures. Typically, the mechanical analysis is
performed by a Lagrangian approach using the undeformed po-
sition of the structures. However, the electrostatic analysis is per-
formed by using the deformed position of the conductors. In this
paper, we introduce a Lagrangian approach for electrostatic anal-
ysis. In this approach, when the conductors undergo deformation
or shape changes, the surface charge densities on the deformed
conductors can be computed without updating the geometry of the
conductors. The Lagrangian approach is a simple, but critical, idea

  

Source: Aluru, Narayana R. - Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign

 

Collections: Engineering; Materials Science