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Silicon Opto-Acoustic Oscillator Suresh Sridaran and Sunil A. Bhave

Summary: Silicon Opto-Acoustic Oscillator
Suresh Sridaran and Sunil A. Bhave
OxideMEMS Lab, Cornell University, Ithaca, NY, USA
Abstract: The Opto-Electronic Oscillator (OEO) is state-of-the-art for generation of low-phase-
noise RF signals in the 1-30 GHz frequency range. The OEO uses a RF filter and an electro-optic
modulator for filtering the RF signal and up-converting it to optical frequencies [1]. Our group has
previously demonstrated a combined MEMS Acoustic filter + Optical modulator using silicon RF
MEMS fabrication technology [2]. In this paper we report on improving the up-conversion loss of
the Acousto-Optic modulator from -70dB to -26dB using an implant mask to reduce contact and
series resistances. This low conversion loss enables us to close the optical and RF loops around the
modulator, using an amplifier, to make an oscillator. This hybrid "Opto-Acoustic Oscillator"
oscillates at 237 MHz with 5mW output power.
OCIS codes: (230.4685) Optical microelectromechanical devices, (070.1060) Acousto-optical signal processing,
(130.4110) Modulators
1. Introduction
Opto-electronic Oscillators (OEOs) [1] have superior phase noise compared to traditional quartz and acoustic
MEMS oscillators in the 1-30GHz frequency range. Recent work to miniaturize the OEO has focused on replacing
the optical fiber delay with a whispering-gallery mode high-Q resonator delay [3]. These OEO architectures
currently consist of an independent electro optic modulator and a RF filter in the loop [1]. Demonstration of a


Source: Afshari, Ehsan - School of Electrical and Computer Engineering, Cornell University


Collections: Engineering