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Titania, silicon dioxide, and tantalum pentoxide waveguides and optical resonant filters prepared

Summary: Titania, silicon dioxide, and tantalum pentoxide
waveguides and optical resonant filters prepared
with radio-frequency magnetron sputtering and
Rabi Rabady and Ivan Avrutsky
Mixing dielectric materials in solid-thin-film deposition allows the engineering of thin films' optical
constants to meet specific thin-film-device requirements, which can be significantly useful for optoelec-
tronics devices and photonics technologies in general. In principle, by use of radio-frequency (rf) mag-
netron sputtering, it would be possible to mix any two, or more, materials at different molar ratios as long
as the mixed materials are not chemically reactive in the mixture. This freedom in material mixing by
use of magnetron sputtering has an advantage by providing a wide range of the material optical
constants, which eventually enables the photonic-device designer to have the flexibility to achieve optimal
device performance. We deposited three combinations from three different oxides by using rf magnetron
sputtering and later investigated them for their optical constants. Each two-oxide mixture was done at
different molar ratio levels. Moreover, postdeposition annealing was investigated and was shown to
reduce the optical losses and to stabilize the film composition against environmental effects such as aging
and humidity exposure. These investigations were supported by the fabricated planar waveguides and
optical resonant filters. 2005 Optical Society of America
OCIS codes: 310.6860, 230.7390, 130.3120.
1. Introduction


Source: Avrutsky, Ivan - Department of Electrical and Computer Engineering, Wayne State University


Collections: Engineering