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1454 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 18, NO. 6, DECEMBER 2009 Stochastic Analysis of Electrostatic MEMS
 

Summary: 1454 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 18, NO. 6, DECEMBER 2009
Stochastic Analysis of Electrostatic MEMS
Subjected to Parameter Variations
Nitin Agarwal and Narayana R. Aluru
Abstract--This paper presents an efficient stochastic framework
for quantifying the effect of stochastic variations in various de-
sign parameters such as material properties, geometrical features,
and/or operating conditions on the performance of electrostatic
microelectromechanical systems (MEMS) devices. The stochastic
framework treats uncertainty as a separate dimension, in addi-
tion to space and time, and seeks to approximate the stochastic
dependent variables using sparse grid interpolation in the multidi-
mensional random space. This approach can be effectively used to
compute important information, such as moments (mean and vari-
ance), failure probabilities, and sensitivities with respect to design
variables, regarding relevant quantities of interest. The approach
is straightforward to implement and, depending on the accuracy
required, can be orders of magnitude faster than the traditional
Monte Carlo method. We consider two examples--MEMS switch
and resonator--and employ the proposed approach to study the

  

Source: Aluru, Narayana R. - Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign

 

Collections: Engineering; Materials Science