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High rejection, tunable parallel resonance in micromachined lead zirconate titanate on silicon resonators
 

Summary: High rejection, tunable parallel resonance in micromachined lead zirconate
titanate on silicon resonators
Sarah S. Bedair,1,a)
Daniel Judy,1
Jeffrey Pulskamp,1
Ronald G. Polcawich,1
Adam Gillon,1
Eugene Hwang,2
and Sunil Bhave2
1
U.S. Army Research Laboratory, Adelphi, Maryland 20783, USA
2
OxideMEMS Laboratory, Cornell University, Ithaca, New York 14853, USA
(Received 10 June 2011; accepted 19 August 2011; published online 9 September 2011)
This paper presents a micromachined lead zirconate titanate-on-silicon electromechanical
resonator, tunable from series to parallel resonance, for either bandstop or bandpass filter
applications. Scattering parameter measurements (9.2 V direct current (DC) bias) reveal bandstop
rejection levels > 109 dB at 59.74 MHz and passband loss of 40 dB with a 20-dB bandwidth of
25 kHz (0.042%). These compare within 5-dB of the models. Parallel resonance is also observed
for an alternate mechanical mode at 182.8 MHz with a 1.5 V DC bias with a rejection of 54.7 dB, a

  

Source: Afshari, Ehsan - School of Electrical and Computer Engineering, Cornell University

 

Collections: Engineering