Summary: 942 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 18, NO. 4, AUGUST 2009
An Integrated 800-MHz Coupled-Resonator Tunable
Bandpass Filter in Silver With a Constant Bandwidth
Mina Rais-Zadeh, Member, IEEE, Hossein M. Lavasani, Student Member, IEEE,
Aditya Kapoor, and Farrokh Ayazi, Senior Member, IEEE
Abstract--This paper presents a fully integrated tunable
lumped filter on silicon using a low-temperature silver microma-
chining process. A prototype 836-MHz bandpass filter with a 3-dB
bandwidth of 5.9% and insertion loss of 4.8 dB is demonstrated in
a second-order coupled-resonator configuration. Continuous tun-
ing of 50 MHz is achieved by electrostatically actuating the lateral
air-gap capacitors of the filter. To control the bandwidth while tun-
ing the center frequency, reconfigurable termination impedance is
proposed. As a proof of concept, a low-noise amplifier with tunable
input impedance is designed to interface with the bandpass filter.
The tunable impedance is realized at the input of the low-noise
amplifier using a shunt positive metal­oxide­semiconductor tran-
sistor. The fabrication, design, and measurement results of the
filter are detailed, and future research directions to improve the
performance of such filters are discussed. [2009-0031]

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

Collections: Engineering