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IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 41, NO. 12, DECEMBER 2006 2983 A 4.5-mW Closed-Loop Micro-Gravity
 

Summary: IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 41, NO. 12, DECEMBER 2006 2983
A 4.5-mW Closed-Loop Micro-Gravity
CMOS SOI Accelerometer
Babak Vakili Amini, Member, IEEE, Reza Abdolvand, Student Member, IEEE, and
Farrokh Ayazi, Senior Member, IEEE
Abstract--In this paper, design, implementation and character-
ization of a 3-V switched-capacitor (SC) CMOS interface cir-
cuit for the closed-loop operation of a lateral capacitive micro-
gravity silicon-on-insulator (SOI) accelerometer is presented. The
interface circuit is based on a front-end programmable reference-
capacitorless SC charge amplifier and a back-end second-order SC
modulator. The accelerometer is fabricated through a dry-re-
lease high aspect-ratio reduced-gap process. By incorporating the
low- transfer function of the microaccelerometer in a feedback
loop, the system's dynamic range is improved by 20 dB, leading to
a measured resolution of 4 g Hz and an output dynamic range
of 95 dB at 20 Hz. The bias instability is 2 to 8 g for 12 hours. The
chip is fabricated in the 0.5- m standard CMOS process with an
area of 2.25 mm . The integrated circuit (IC) consumes 4.5 mW of
power.

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering