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Hybrid connection of RF MEMS and SMT components in an impedance tuner Mehmet Unlu , Kagan Topalli, Halil Ibrahim Atasoy, Simsek Demir, Ozlem Aydin Civi, Tayfun Akin
 

Summary: Hybrid connection of RF MEMS and SMT components in an impedance tuner
Mehmet Unlu , Kagan Topalli, Halil Ibrahim Atasoy, Simsek Demir, Ozlem Aydin Civi, Tayfun Akin
Department of Electrical and Electronics Engineering, Middle East Technical University, Inonu Bulvari, Ankara 06531, Turkey
a r t i c l e i n f o
Article history:
Received 24 March 2009
Accepted 30 May 2009
Keywords:
RF MEMS
Impedance tuner
Switch
SMT
Hybrid
a b s t r a c t
This paper presents a systematic construction of a model for a hybrid connected RF MEMS and SMT
components in a reconfigurable impedance tuner. The double stub hybrid impedance tuner which
employs a high number of MEMS switches is selected to demonstrate the feasibility of the connections.
In the hybrid tuner, MEMS switches are actuated with DC bias signals, where SMT resistors de-couple
RF from the DC lines. The hybrid tuner is realized in two steps, where the MEMS impedance tuner is
fabricated on a glass substrate using an in-house surface micromachining process, and the SMT resistors

  

Source: Akin, Tayfun - Department of Electrical and Electronics Engineering, Middle East Technical University

 

Collections: Engineering