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Summary: Hybrid connection of RF MEMS and SMT components in an impedance tuner
Mehmet Unlu Ã, Kagan Topalli, Halil Ibrahim Atasoy, Simsek Demir, Ozlem Aydin Civi, Tayfun Akin
Department of Electrical and Electronics Engineering, Middle East Technical University, Inonu Bulvari, Ankara 06531, Turkey
a r t i c l e i n f o
Article history:
Received 24 March 2009
Accepted 30 May 2009
Keywords:
RF MEMS
Impedance tuner
Switch
SMT
Hybrid
a b s t r a c t
This paper presents a systematic construction of a model for a hybrid connected RF MEMS and SMT
components in a reconfigurable impedance tuner. The double stub hybrid impedance tuner which
employs a high number of MEMS switches is selected to demonstrate the feasibility of the connections.
In the hybrid tuner, MEMS switches are actuated with DC bias signals, where SMT resistors de-couple
RF from the DC lines. The hybrid tuner is realized in two steps, where the MEMS impedance tuner is
fabricated on a glass substrate using an in-house surface micromachining process, and the SMT resistors
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