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EFFECT OF PHONON INTERACTIONS ON LIMITING THE f.Q PRODUCT OF MICROMECHANICAL RESONATORS
 

Summary: EFFECT OF PHONON INTERACTIONS ON LIMITING THE f.Q PRODUCT OF
MICROMECHANICAL RESONATORS
R. Tabrizian1*
, M. Rais-Zadeh2*
, and F. Ayazi1
1
Georgia Institute of Technology, Atlanta, Georgia, USA
2
University of Michigan, Ann Arbor, Michigan, USA
ABSTRACT
We discuss the contribution of phonon interactions in
determining the upper limit of f.Q product in
micromechanical resonators. There is a perception in the
MEMS community that the maximum f.Q product of a
microresonator is limited to a "frequency-independent
constant" determined by the material properties of the
resonator [1]. In this paper, we discuss that for frequencies
higher than 1= , where is the phonon relaxation
time, the f.Q product is no longer constant but a linear
function of frequency. This makes it possible to reach very

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering