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IEEE PHOTONICS TECHNOLOGY LETTERS, VOL. 20, NO. 23, DECEMBER 1, 2008 1905 A Magnetically Actuated Resonant Mass Sensor With
 

Summary: IEEE PHOTONICS TECHNOLOGY LETTERS, VOL. 20, NO. 23, DECEMBER 1, 2008 1905
A Magnetically Actuated Resonant Mass Sensor With
Integrated Optical Readout
Alibey Ozturk, H. Ilker Ocakli, Natali Ozber, Hakan Urey, Member, IEEE, I. Halil Kavakli, and
B. Erdem Alaca, Member, IEEE
Abstract--Nickel cantilevers with integrated diffraction grat-
ings are used as resonant mass sensors with a resolution of
500 femtograms. Their applicability to biosensing is demonstrated
with human opioid receptors. The device is fabricated through
a single-mask lithographic process. The microoptical readout
provides a simple measurement platform with one external photo-
diode. Thanks to its ac operation principle, the device is immune
to environmental noise and entails a high tolerance to fabrication
defects. Obtained signal-to-noise ratio is comparable to that of a
high-end Doppler vibrometer. The device with these aspects for
systems integration and microarray technology is a candidate for
low-cost portable sensors.
Index Terms--Interferometry, magnetic films, microelectrome-
chanical devices, resonators.
I. INTRODUCTION

  

Source: Alaca, B. Erdem - Department of Mechanical Engineering, Koc University

 

Collections: Engineering