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Summary: SILICON MONOLITHIC ACOUSTO-OPTIC MODULATOR
Suresh Sridaran and Sunil A. Bhave
Cornell University, Ithaca, NY, USA
ABSTRACT
This paper reports on the co-fabrication of RF MEMS
radial contour mode resonators and photonic
whispering gallery mode disk resonators on the same
SOI substrate. By mechanically coupling the MEMS
and photonic resonators, we have demonstrated a
silicon acousto-optic modulator (AOM) which can
modulate a 1550 nm laser at 288 MHz. An output RF
power of -83.7 dBm is observed corresponding to a
modulation of ±415 nW around a biased optical
output of 3.98 µW. The AOM has a footprint of 50
µm × 30 µm and bandwidth of 24.2 kHz in vacuum
due to a high mechanical quality factor (Q) of 11,890.
INTRODUCTION
Commercial off-the-shelf acousto-optic modulators
work by launching a traveling acoustic wave with an
inter-digitated transducer (IDT) into an acousto-
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