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Integration of 3-D Stereographic Imaging Techniques with a Large-Chamber Scanning Electron Microscope

Summary: Integration of 3-D Stereographic Imaging Techniques with a Large-Chamber
Scanning Electron Microscope
Jaret J. Frafjord,* Steven J. Dekanich,* Besma Abidi,** David L. Page,** and Mongi A. Abidi,**
* Y-12 National Security Complex, Bear Creek Rd., Oak Ridge, TN 37831
** University of Tennessee, 1508 Middle Drive, Knoxville, TN 37996
The scanning electron microscope (SEM) has long been used for the observation and measurement
of samples in the x- and y-directions. However, there is often the need to measure depths of features
in the z-direction. Although a single depth can be adequately measured by comparison of focal
depths between two points, complex topographies need further modeling to better visualize the
change in depths across the surface.
The Y-12 National Security Complex in Oak Ridge, TN operates a large-chamber scanning electron
microscope (LC-SEM) that has the largest chamber in the world at eight cubic meters. The
instrument can examine specimens measuring up to 1-m in diameter by 1-m tall and weighing as
much as 300-kg. This microscope provides high-resolution images using a mobile column that
moves around the sample on a four-axis positioning system. This mobile column allows the
flexibility for complex and complete visualization of the same region at several angles. While
maintaining the same working distance, central point, and magnification, two or more images of the
same region at known offset angles establishes stereographic image pairs. This eucentric tilting of
the specimen by a small angle creates two images as if viewed from slightly different directions.
The Imaging, Robotics, and Intelligent Systems (IRIS) Lab at the University of Tennessee has


Source: Abidi, Mongi A. - Department of Electrical and Computer Engineering, University of Tennessee


Collections: Computer Technologies and Information Sciences