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Summary: Capacitance of a doubly clamped beam mechanical resonator.
Final Project in
Introduction to Computational Physics course 118094
Stav Zaitsev
Electrical Engineering Department,
Technion - Israel Institute of Technology,
Haifa, Israel
October 26, 2009
Contents
1 Introduction 2
2 Doubly-clamped beam oscillator 2
2.1 Device geometry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
2.2 Numerical extraction of capacitances . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
2.3 Triangular mesh construction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.4 Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3 Summary 12
4 Acknowledgment 12
e-mail: zzz@tx.technion.ac.il
1 Introduction
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