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JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 19, NO. 3, JUNE 2010 503 Micromechanical IBARs: Tunable High-Q
 

Summary: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 19, NO. 3, JUNE 2010 503
Micromechanical IBARs: Tunable High-Q
Resonators for Temperature-Compensated
Reference Oscillators
Gavin K. Ho, Member, IEEE, Krishnakumar Sundaresan, Member, IEEE,
Siavash Pourkamali, Member, IEEE, and Farrokh Ayazi, Senior Member, IEEE
Abstract--This paper presents a unique capacitive microme-
chanical resonator and oscillator architecture for temperature-
compensated frequency references. The I-shaped bulk acoustic
resonator (IBAR) is designed to have excellent electrical tunabil-
ity for temperature compensation (TC) and dynamic frequency
control. High quality factor and low motional resistance are also
achieved. The applicable range of frequencies is 130 MHz, in
which quality factors exceeding 100 000 have been measured.
Resonator metrics, including the electrostatic tuning coefficient,
normalized dynamic stiffness, and relative dynamic compliance,
are introduced. A small-signal resistance in the resonator is re-
ported and explained. This unexpected resistance is beneficial for
oscillator functionality over a large temperature range. The inter-
face IC, inclusive of all blocks for sustaining oscillations and TC,

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering