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JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 19, NO. 4, AUGUST 2010 827 Lamb Waves and Resonant Modes in
 

Summary: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 19, NO. 4, AUGUST 2010 827
Lamb Waves and Resonant Modes in
Rectangular-Bar Silicon Resonators
Giorgio Casinovi, Senior Member, IEEE, Xin Gao, and Farrokh Ayazi, Senior Member, IEEE
Abstract--This paper presents two newly developed models of
capacitive silicon bulk acoustic resonators (SiBARs) characterized
by a rectangular-bar geometry. The first model is derived from
an approximate analytical solution of the linear elastodynamic
equations for a parallelepiped made of an orthotropic material.
This solution, which is recognized to represent a Lamb wave
propagating across the width of the resonator, yields the frequen-
cies and shapes of the resonance modes that typically govern the
operation of SiBARs. The second model is numerical and is based
on a finite-element multiphysics simulation of both acoustic wave
propagation in the resonator and electromechanical transduction
in the capacitive gaps of the device. It is especially useful in
the computation of the SiBAR performance parameters, which
cannot be obtained from the analytical model, e.g., the relationship
between the transduction area and the insertion loss. Comparisons
with the measurements taken on a set of silicon resonators fabri-

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering