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1 2004 IEEE International Solid-State Circuits Conference 0-000-000-0/00/$10.00 2004 IEEE ISSCC 2004 / SESSION 17 / MEMS AND SENSORS / 17.3
 

Summary: 1 2004 IEEE International Solid-State Circuits Conference 0-000-000-0/00/$10.00 2004 IEEE
ISSCC 2004 / SESSION 17 / MEMS AND SENSORS / 17.3
17.3 A 2.5V 14-bit CMOS-SOI
Capacitive Accelerometer
Babak Vakili Amini, Siavash Pourkamali, Farrokh Ayazi
Georgia Institute of Technology, Atlanta, GA
Low cost high precision MEMS accelerometers with near g res-
olution and stability are needed in a number of applications
ranging from GPS-augmented inertial navigation systems to
guidance and stabilization of satellites and spacecrafts [1]. This
paper presents a truly 14b modulator interface IC for a high-
resolution SOI capacitive accelerometer fabricated in a simple
stictionless process that improves the performance and manu-
facturability of high-sensitivity accelerometers. The interface IC
is designed and fabricated in the 2.5V 0.25m 2P5M N-well
CMOS process provided by National Semiconductor and inter-
faced with the accelerometer chip using wire-bonds. Power con-
sumption is 6mW including an on-chip multiphase clock genera-
tor for data sampling. The measured resolution of the accelerom-
eter system is 110g at 75Hz with a 1Hz resolution bandwidth

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering