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Summary: 1278 IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY,VOL. 7, NO. 2, JUNE 1997
eposition of YBCO Thin Films over Large Areas
by a 90" Qff-Axis Sputtering Technique
R. A. Rao, C. B. Eom
Department of Mechanical Engineering and Materials Science,Duke University,Durham, NC 27708.
M. Santer, and S. M. Anlage
Department of Physics, Center for Superconductivity Research, University of Maryland, College Park, MD 20742
Abstract-We report the deposition of YBCO thin
films with uniform thickness (45%variation), and
stoichiometric composition ( 4 . 3 % deviation from
the target stoichiometry) over an 8" diameter area,
by a single target 90" off-axis sputtering technique
using a 3" diameter target and optimized substrate
rotation. A 3" diameter resistive heater was used
with optimized rotation in two consecutive
deposition runs to study the variation in film
properties of small test samples deposited over an
8" diameter area. Due to the inherent temperature
non-uniformity of the heater, all the samples could
not be deposited under optimum growth conditions.
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