Summary: Monolithic integration of Si nanowires with metallic electrodes: NEMS resonator and switch
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2011 J. Micromech. Microeng. 21 125018
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IOP PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING
J. Micromech. Microeng. 21 (2011) 125018 (9pp) doi:10.1088/0960-1317/21/12/125018
Monolithic integration of Si nanowires
with metallic electrodes: NEMS resonator
and switch applications
Evren F Arkan1, Davide Sacchetto2, Izzet Yildiz1, Yusuf Leblebici2 and
B Erdem Alaca1
College of Engineering, Ko¸c University, Rumeli Feneri Yolu, 34450 Sariyer, Istanbul, Turkey