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Monolithic integration of Si nanowires with metallic electrodes: NEMS resonator and switch applications
 

Summary: Monolithic integration of Si nanowires with metallic electrodes: NEMS resonator and switch
applications
This article has been downloaded from IOPscience. Please scroll down to see the full text article.
2011 J. Micromech. Microeng. 21 125018
(http://iopscience.iop.org/0960-1317/21/12/125018)
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IOP PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING
J. Micromech. Microeng. 21 (2011) 125018 (9pp) doi:10.1088/0960-1317/21/12/125018
Monolithic integration of Si nanowires
with metallic electrodes: NEMS resonator
and switch applications
Evren F Arkan1, Davide Sacchetto2, Izzet Yildiz1, Yusuf Leblebici2 and
B Erdem Alaca1
1
College of Engineering, Koc University, Rumeli Feneri Yolu, 34450 Sariyer, Istanbul, Turkey

  

Source: Alaca, B. Erdem - Department of Mechanical Engineering, Koc University

 

Collections: Engineering