Home

About

Advanced Search

Browse by Discipline

Scientific Societies

E-print Alerts

Add E-prints

E-print Network
FAQHELPSITE MAPCONTACT US


  Advanced Search  

 
Compact Parametric Model of Capacitive BAW Giorgio Casinovi, Ashwin K. Samarao and Farrokh Ayazi
 

Summary: Compact Parametric Model of Capacitive BAW
Resonators
Giorgio Casinovi, Ashwin K. Samarao and Farrokh Ayazi
School of Electrical and Computer Engineering
Georgia Institute of Technology
Atlanta, GA 30332, USA
Abstract--This paper presents a new equivalent-circuit model of
SiBARs, derived in a mathematically rigorous way from the
physics equations governing the behavior of the device. The
model is parametric, that is, the model component values can be
computed directly from the dimensions of the resonator and the
properties of the material. The model also accounts fully,
accurately and automatically for aspects of the device behavior
that arise from the interaction of multiple physics domain: the
shift in the resonance frequency with the polarization voltage
("spring softening"), the effect of the polarization voltage and
gap size on the insertion loss, and the reduction in the resonator
loaded Q as the polarization voltage is increased. In contrast,
those effects are not automatically accounted for by other
models, such as mass-spring combinations. Finally, the model

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering