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Electrolysis-based Parylene Balloon Actuators for Movable Neural Probes
 

Summary: Electrolysis-based Parylene Balloon Actuators for Movable
Neural Probes
Changlin Pang1
, Yu-Chong Tai1
, Joel W. Burdick2
, and Richard A. Andersen3
1
Caltech Micromachining Lab, California Institute of Technology, Pasadena, CA 91125, USA
2
Department of Mechanical Engineering, California Institute of Technology, Pasadena, CA 91125, USA
3
Division of Biology, California Institute of Technology, Pasadena, CA 91125, USA
Abstract--In order to track a specific neuron and keep good
sampling neural signals during chronic implantation, the neural
probes are highly desired to have moving capability. This paper
presents a novel electrolysis-based parylene balloon actuator
fabricated with MEMS technology. The actuator is integrated
with silicon probe to make it movable. A new fabrication
technology has been developed to build a parylene balloon
structure with silicon spring structure, electrolysis electrodes and

  

Source: Andersen, Richard - Division of Biology, California Institute of Technology

 

Collections: Biology and Medicine