 
Summary: Capacitance Extraction Script
User Manual
Stav Zaitsev
Electrical Engineering Department,
Technion  Israel Institute of Technology,
Haifa, Israel
October 26, 2009
1 Introduction
The Matlab script capacitance_extraction_gui.m loads a graphical user interface (GUI) which allows
an interactive extraction of capacitance matrices for two conductors of virtually arbitrary geometry, as
described in [1]. The main window of the GUI can be seen in Fig. 1.
First, the two conductors are dened as two rectangular right angle prisms. After the meshing, an
arbitrary form function can be applied to the mesh nodes of each conductor, as explained below. As
a result, it is possible to model many dierent device geometries. In the example used here, the rst
conductor (mechanical beam resonator) is bent by using a cosine form function, and the second conductor
(stationary electrode) is simply shifted in y direction.
2 Capacitance extraction ow
2.1 Parameter table
In order to dene all the parameters of the original rectangular beams and the original triangular mesh,
