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1790 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 42, NO. 8, AUGUST 2007 A 104-dB Dynamic Range Transimpedance-Based
 

Summary: 1790 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 42, NO. 8, AUGUST 2007
A 104-dB Dynamic Range Transimpedance-Based
CMOS ASIC for Tuning Fork Microgyroscopes
Ajit Sharma, Student Member, IEEE, Mohammad Faisal Zaman, Student Member, IEEE, and
Farrokh Ayazi, Senior Member, IEEE
Abstract--In this paper, the design, implementation and charac-
terization of a continuous time transimpedance-based ASIC for the
actuation and sensing of a high- MEMS tuning fork gyroscope
(TFG) is presented. A T-network transimpedance amplifier (TIA)
is used as the front-end for low-noise, sub-atto-Farad capacitive
detection. The T-network TIA provides on-chip transimpedance
gains of up to 25 M
, has a measured capacitive resolution of
0.02 aF/ Hz at 15 kHz, a wide dynamic range of 104 dB in a band-
width of 10 Hz and consumes 400 W of power. The CMOS inter-
face ASIC uses this TIA as the front-end to sustain electromechan-
ical oscillations in a MEMS TFG with motional impedance greater
than 10 M
. The TFG interfaced with the ASIC yields a two-chip
angular rate sensor with measured rate noise floor of 2.7 /hr/ Hz,

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering