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JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 15, NO. 2, APRIL 2006 355 Complex Nonlinear Oscillations in Electrostatically
 

Summary: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 15, NO. 2, APRIL 2006 355
Complex Nonlinear Oscillations in Electrostatically
Actuated Microstructures
Sudipto K. De and N. R. Aluru, Member, IEEE, Associate Member, ASME
Abstract--In this paper, new nonlinear dynamic properties of
electrostatically actuated microstructures [referred to as electro-
static microelectromechanical systems (MEMS)] observed under
superharmonic excitations are presented using numerical simula-
tions. Application of a large dc bias (close to the pull-in voltage of
the device) is found to bring the device to a nonlinear state. This
nonlinear state (referred to as "dc-symmetry breaking") can be
clearly observed from the characteristic change in the phase-plot
of the device. Once a steady nonlinear state is reached, applica-
tion of an ac signal at the th superharmonic frequency with an
amplitude around "ac-symmetry breaking" gives rise to oscil-
lations per period or -cycles in the MEM device. "ac-symmetry
breaking" can also be observed by a characteristic change in the
phase-plot of the device. On further increasing the ac voltage, a
period doubling sequence takes place resulting in the formation of
2 -cycles in the system at the th superharmonic frequency.

  

Source: Aluru, Narayana R. - Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign

 

Collections: Engineering; Materials Science