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Capacitive Interface for a Vertically-Driven X&Y-Axis Rate Gyroscope Xuesong Jiang, Sunil A. Bhave, Joseph I. Seeger, Roger T. Howe, Bernhard E. Boser
 

Summary:  Capacitive Interface for a Vertically-Driven X&Y-Axis Rate Gyroscope
Xuesong Jiang, Sunil A. Bhave, Joseph I. Seeger, Roger T. Howe, Bernhard E. Boser
Berkeley Sensor & Actuator Center
University of California, Berkeley, CA 94720, USA
Email: xsjiang@eecs.berkeley.edu
John Yasaitis
Analog Devices Inc., Cambridge, MA 02139, USA
Abstract
This paper presents the capacitive sensing interface
for a vertically-driven X&Y-Axis rate gyroscope
fabricated in a monolithic MEMS/circuits technology
with 0.8Ám CMOS and 6Ám thick structural polysilicon.
The Coriolis-acceleration transducer and the capacitive
sensing interface form a continuous-time 2nd
-order 1-bit
modulator. The gyroscope achieves 8.6░/sec/Hz
noise floor at atmospheric pressure.
1. Introduction
Gyroscopes find a wide range of applications such as
inertial navigation systems, roll-over detection in

  

Source: Afshari, Ehsan - School of Electrical and Computer Engineering, Cornell University
Boser, Bernhard E. - Department of Electrical Engineering and Computer Sciences, University of California at Berkeley

 

Collections: Engineering