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Summary: UCSB Nanofabrication Facility
College of Engineering
A Multidisciplinary Research Facility
Serving UCSB and the
Greater Research Community
Nanofab Facility Overview
~13000 ft2 of total clean space in cleanroom (Class 1000, 100).
Class 1,000 Deposition
Bay 3 New CR
Class 100 Litho1
Bay 6 New CR
Main Corridor
7 Bays
Facility Overview
Director : Prof. Mark Rodwell
Staff of 16 including 3 Ph.D. Level Scientists/Engineers offering process
and equipment support.
Provide laboratory access and REMOTE processing.
Remote Processing on best-effort basis only
Rates: $120/hour for machine use (Ebeam lithography $450/hr)
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