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Summary: In situ Raman spectroscopic studies of trimethylindium pyrolysis in
an OMVPE reactor
Chinho Park,*a
Woo-Sik Jung,a
Zhisong Huangb
and Timothy J. Andersonc
a
School of Chemical Engineering and Technology, Yeungnam University, 712-749 Gyongsan,
Korea. E-mail: chpark@yu.ac.kr
b
Lam Research Corp, Fremont, California 94538-6470, USA
c
Department of Chemical Engineering, University of Florida, Gainesville, FL 32611-6005,
USA. E-mail: tim@nersp.nerdc.ufl.edu
Received 21st August 2001, Accepted 9th October 2001
First published as an Advance Article on the web 12th December 2001
An in situ investigation of thermal decomposition reactions of trimethylindium (TMIn) in a vertical, upflow
chemical vapor deposition reactor has been carried out using Raman spectroscopy. Monomethylindium
(MMIn) and atomic indium were detected along with the precursor TMIn using N2 as the carrier gas. Atomic
indium was identified by the peak at 2215 cm21
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