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1228 IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS, VOL. 22, NO. 9, SEPTEMBER 2003 Efficient Mixed-Domain Analysis of
 

Summary: 1228 IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS, VOL. 22, NO. 9, SEPTEMBER 2003
Efficient Mixed-Domain Analysis of
Electrostatic MEMS
Gang Li, Student Member, IEEE, and N. R. Aluru, Member, IEEE
Abstract--We present efficient computational methods for
scattered point and meshless analysis of electrostatic microelec-
tromechanical systems (MEMS). Electrostatic MEM devices
are governed by coupled mechanical and electrostatic energy
domains. A self-consistent analysis of electrostatic MEMS is
implemented by combining a finite cloud method-based interior
mechanical analysis with a boundary cloud method (BCM)-based
exterior electrostatic analysis. Lagrangian descriptions are used
for both mechanical and electrostatic analyses. Meshless finite
cloud and BCMs, combined with fast algorithms and Lagrangian
descriptions, are flexible, efficient, and attractive alternatives
compared to conventional finite element/boundary element
methods for self-consistent electromechanical analysis. Numerical
results are presented for MEM switches, a micromirror device, a
lateral comb drive microactuator, and an electrostatic comb drive
device. Simulation results are compared with experimental and

  

Source: Aluru, Narayana R. - Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign

 

Collections: Engineering; Materials Science