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THROUGH-SUPPORT-COUPLED MICROMECHANICAL FILTER ARRAY Gavin K. Ho, Reza Abdolvand, and Farrokh Ayazi
 

Summary: THROUGH-SUPPORT-COUPLED MICROMECHANICAL FILTER ARRAY
Gavin K. Ho, Reza Abdolvand, and Farrokh Ayazi
School of Electrical and Computer Engineering, Georgia Institute of Technology
ABSTRACT
This paper presents a new concept for implementing high-
order mechanically-coupled ultra-small bandwidth micro-
mechanical filter arrays without using discrete coupling
elements. Adjacent resonators are coupled by elastic
deformation at the support, and filter bandwidth is defined by
the spacing between resonating elements. We demonstrate a
second-order through-support-coupled capacitively-
transduced 1.72MHz 0.008%BW (Qfilter12000) bandpass
flexural-mode beam filter array implemented on SOI. The
coupling concept and experimental results were verified with
finite element analysis using ANSYS. This integrated
coupling technique does not introduce additional fabrication
requirements for a discrete mechanical coupling element and
therefore has strong potential for application to high-order
higher frequency filter arrays. Resonator fine tuning is
shown to be essential for obtaining ultra-small coupling-

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering