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SUPPORT LOSS IN MICROMECHANICALDISKRESONATORS Zhili Ha0 andFavrukh Ayazi
 

Summary: SUPPORT LOSS IN MICROMECHANICALDISKRESONATORS
Zhili Ha0 andFavrukh Ayazi
Integrated MEMS Laboratory, School of Electrical and Computer Engineering,
Georgia Institute of Technology,777 Atlantic Drive, Atlanta, GA 30332-0250, USA
AFSTRACT
In light of recent efforts to implement
micromechanical resonators with high+ and high
frequency, an analytical model for support loss in
micromechanical disk resonators has been developed
and verified with experimental results. The derived
model is general and applicable to various structures
ind support schemes (side-supported and center-
supported disks), providing significant insight to the
geometrical design and choice of materials in high-Q
disk resonant structures. The methodology presented in
this paper can be extended to evaluate support loss in
other high-frequency bulk-mode structures such as
length-extensionalblocks and bars.
1. INTRODUCTION
The mechanical quality factor (Q) of a resonator is

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering