| | |
Summary: Sugar: Advancements in a 3D Multi-domain Simulation Package for MEMS
J.V. Clark, D. Bindel, N. Zhou, S. Bhave, Z. Bai, J. Demmel, K.S.J. Pister
Berkeley Sensor & Actuator Center
University of California at Berkeley, Berkeley, CA, USA
497 Cory Hall, jvclark@eecs.berkeley.edu
ABSTRACT
Advancements in Sugar include 1) parameterizable netlists,
2) nonlinear frequency response analysis, 3) subnets, 4)
improved MNA, 5) reduced order modeling, and 6) a more
accurate nonlinear beam model. Examples of these features
include the simulation of a two-axis mirror with over 10,000
degrees of freedom, the reduced order modeling applied of an
electrostatic gap actuator, the parameterized deflection space
of a thermal actuator and serpentine flexure, and the
nonlinear response of a fixed-fixed beam.
Keywords: Modified nodal analysis, modeling, Sugar,
simulation.
1 INTRODUCTION
As we witness the unfolding of the micromachine revolution,
microelectromechanical systems are moving from simple
|
