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Summary: AN INTEGRATED, VERTICAL-DRIVE, IN-PLANE-SENSE MICROGYROSCOPE
Sunil A. Bhave, Joseph I. Seeger, Xuesong Jiang, Bernhard E. Boser, Roger T. Howe and John Yasaitis*
Berkeley Sensor & Actuator Center, 497 Cory Hall, University of California, Berkeley, CA 94720, USA
*
Analog Devices Inc., 21 Osborn Street, Cambridge, MA 02139, USA
ABSTRACT
This paper describes the principle of operation and
experimental results of a Y-axis force-feedback
gyroscope. The gyroscope was fabricated in Analog
Devices' monolithic Modular-MEMS process with 6µm
thick structural polysilicon and 0.8µm CMOS. The sensor
utilizes vertical (Z-axis) actuation of the proof mass to
enable in-plane (X-axis) differential sensing of the Coriolis
force. Two orthogonally-oriented gyroscopes form a dual-
axis rate sensor. The gyroscope achieves 8º/sec/ Hz noise
floor, for operation at ambient pressure.
INTRODUCTION
Micromachined, monolithic accelerometers and
gyroscopes have gained popularity in the automotive
industry for air-bag deployment and roll-over detection
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