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Summary: Bulk Modes in Silicon Crystal Silicon
Gavin K. Ho
ParibX, Inc.
Mountain View, CA USA
gavinho@ieee.org
Siavash Pourkamali
Dept. of Electrical and Computer Eng.
University of Denver
Denver, CO USA
Farrokh Ayazi
School of Electrical and Computer Eng.
Georgia Institute of Technology
Atlanta, GA USA
Abstract--Bulk dilation modes in rectangular plates of
particular orientations in single crystal silicon are found to have
distinct advantages over to those in isotropic materials. Finite
element modeling using an anisotropic model reveals plates
aligned to the <110> direction in (100) silicon have modes which
offer excellent capacitive coupling and good isolation to the
supports. Low impedance and high Q are predicted for select
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