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A NEW NEURAL RECORDING ELECTRODE ARRAY WITH PARYLENE INSULATING LAYER
 

Summary: A NEW NEURAL RECORDING ELECTRODE ARRAY
WITH PARYLENE INSULATING LAYER
Changlin Pang1
, Jorge G.Cham2
, Zoran Nenadic2
, Yu-Chong Tai1
,
Joel W. Burdick2
, and Richard A. Andersen3
1
Caltech Micromachining Lab, California Institute of Technology
2
Department of Mechanical Engineering, California Institute of Technology
3
Division of Biology, California Institute of Technology
ABSTRACT
This work presents a new electrode array applied with parylene technology, used for
recording of high-level cognitive neural signals. All dry etching processes were developed
to fabricate the silicon probes using double-side-polished (DSP) wafers. Instead of
inorganic materials (e.g. silicon dioxide, silicon nitride), the electrodes and conduction

  

Source: Andersen, Richard - Division of Biology, California Institute of Technology

 

Collections: Biology and Medicine