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Summary: Subscriber access provided by University of Florida | Smathers Libraries
Chemistry of Materials is published by the American Chemical Society. 1155
Sixteenth Street N.W., Washington, DC 20036
Article
Computational Study of the Gas Phase Reactions of Isopropylimido
and Allylimido Tungsten Precursors for Chemical Vapor Deposition of
Tungsten Carbonitride Films: Implications for the Choice of Carrier Gas
Yong Sun Won, Young Seok Kim, Timothy J. Anderson, and Lisa McElwee-White
Chem. Mater., 2008, 20 (23), 7246-7251 · Publication Date (Web): 14 November 2008
Downloaded from http://pubs.acs.org on December 3, 2008
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Subscriber access provided by University of Florida | Smathers Libraries
Chemistry of Materials is published by the American Chemical Society. 1155
Sixteenth Street N.W., Washington, DC 20036
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Computational Study of the Gas Phase Reactions of Isopropylimido
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