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Summary: EE6504: Nanoscale Engineering
Nanocharacterization Techniques
Associate Professor Adekunle Adeyeye
Dept. of Electrical & Computer Engineering
National University of Singapore
E-mail: eleaao@nus.edu.sg
Office:E4-08-08
ŠAdekunle Adeyeye 2009/2010
Introduction to Nanotechnology
Nanofabrication techniques
Nanolithography
Natural lithography and self assembly
Nanocharacterization Techniques
SEM,TEM, SPM
Nanoelectronics Devices
Single Electron Transistor
Outline
ŠAdekunle Adeyeye 2009/2010
ŠAdekunle Adeyeye 2009/2010
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