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Summary: 313
1-4244-0842-3/07/$20.00©2007 IEEE
TRANSDUCERS&EUROSENSORS'07
The14thInternationalConferenceonSolid-StateSensors,ActuatorsandMicrosystems,Lyon,France,June10-14,2007
AQUEOUS TRANSDUCTION OF POLY-SIGE DISK RESONATORS
Hengky Chandrahalim1
, Sunil A. Bhave1
, Emmanuel P. Quévy2
and Roger T. Howe3
1
OxideMEMS Lab, Electrical and Computer Engineering, Cornell University, Ithaca, NY 14853, USA
2
Silicon Clocks Inc., Fremont, CA 94538, USA
3
Electrical Engineering, Stanford University, Stanford, CA 94305, USA
(Tel: +1-607-255-1815; E-mail: hc287@cornell.edu)
Abstract: This paper demonstrates an electrostatic transducer for lateral contour-mode resonators in
which the transduction gaps are filled with a liquid dielectric (water) having much higher permittivity
than air ( water = 80.1). Aqueous transduction is more efficient than air-gap transduction (lower motional
impedance) and has a higher frequency tuning range compared than solid-dielectric transduction. We
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