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3D NANOVISION FOR THE INSPECTION OF MICRO-ELECTRO-MECHANICAL SYSTEMS
 

Summary: 3D NANOVISION FOR THE INSPECTION OF
MICRO-ELECTRO-MECHANICAL SYSTEMS
Chris Kammerud, Besma Abidi, Shafik Huq, and Mongi Abidi
The University of Tennessee, Knoxville, TN 37996-2100, USA
besma@utk.edu
ABSTRACT - Micro-electro-mechanical systems (MEMS) are
found in area applications such as the automotive industry, the
aviation industry, the semi-conductor industry, the medical field,
and various other fields where miniaturization is taking over. The
accurate measurement of features on the surface of MEMS is an
important tool for the assessment and monitoring of product
quality. Presented here are the algorithms and results of 3D model
reconstructions of MEMS devices using a variety of microscopic
sensors. These sensors include an atomic force microscope, a
scanning electron microscope, and a laser scanning confocal
microscope. MEMS devices with micron-size features were first
scanned with these microscopes. 3D models were then built and
visualized using methods specific to each microscope. This allows
for the models' use in applications such as inspection, study of
wear and tear, behavior, and reaction of such systems to pressure,

  

Source: Abidi, Mongi A. - Department of Electrical and Computer Engineering, University of Tennessee

 

Collections: Computer Technologies and Information Sciences