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Generating Sub-Micron Features On Rough Surfaces Using Optical Trap Assisted

Summary: Generating Sub-Micron Features On Rough
Surfaces Using Optical Trap Assisted
Yu-Cheng Tsai, Romain Fardel and Craig B. Arnold
Department of Mechanical and Aerospace Engineering and Princeton Institute for Science and
Technology of Materials, Princeton University
Princeton, NJ 08544, USA
Abstract: Near-field intensity enhancement enables laser modification of materials with feature
sizes below the classical diffraction limit. However, the need to maintain close distances
between the objective element and the substrate typically limit demonstrations of this technology
to flat surfaces, even though there are many cases where the ability to produce sub-micron
features on rough or structured surfaces are needed. Here, we show the use of a new technique,
optical trap assisted nanopatterning (OTAN), for the production of nanoscale features on rippled
substrates. The ability to position a microbead near-field objective close to the surface without
the need for active feedback and control allows one to continuously move the bead across a
rough surface without sticking. Sub-micron patterning of polyimide is demonstrated on surfaces
with 1.1 m steps showing good uniformity. Finally, the enabling technology allows for
straightforward parallelization where multiple patterns can be created simultaneously over
Keywords: Optical trap assisted nanopatterning, nanolithography, Bessel beams, Near-field,


Source: Arnold, Craig B. - Department of Mechanical and Aerospace Engineering, Princeton University


Collections: Engineering; Materials Science