| | |
Summary: 3-D MICROMACHINED HEMISPHERICAL SHELL RESONATORS
WITH INTEGRATED CAPACITIVE TRANSDUCERS
L. D. Sorenson, X. Gao, and F. Ayazi
Georgia Institute of Technology, Atlanta, Georgia, USA
ABSTRACT
We present a self-aligned fabrication method
developed for three-dimensional (3-D) microscale
hemispherical shell resonators with integrated capacitive
transducers and a center post for electrical access to the
shell. The self-aligned process preserves the axisymmetry
for robust, balanced resonators that can potentially reach
very high-Q due to suppressed anchor loss. High-Q
operation of a thin polycrystalline silicon shell resonator
is verified by exciting devices capacitively into a
breathing resonance mode, with measured Q of 8,000 at
412 kHz in vacuum. This process can be further
optimized to batch-fabricate micro-hemispherical
resonator gyroscopes for portable inertial navigation.
INTRODUCTION
|
