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Laser patterning of metallic films via buffer layer Gabriel Kerner, Micha Asscher *

Summary: Laser patterning of metallic films via buffer layer
Gabriel Kerner, Micha Asscher *
Department of Physical Chemistry and the Farkas Center for Light Induced Processes, The Hebrew University, Jerusalem 91904, Israel
Received 21 November 2003; accepted for publication 19 February 2004
A novel method is presented for a single pulse laser-patterning of variable width conducting lines on solid surfaces.
Employing laser induced thermal desorption (LITD), potassium coverage grating on top of multilayer Xe is formed on
Ru(0 0 1) at 20 K. Optical second harmonic-diffraction measurements were performed to characterize the grating as a
function of Xe layer thickness and laser power density. Upon annealing to 80 K, the Xe layer desorbs and the metallic
pattern softly lands on the substrate. The potential application of this procedure for the parallel writing of conducting
wires millimeters long and less than 50 nm wide is discussed.
2004 Elsevier B.V. All rights reserved.
Keywords: Growth; Laser methods; Laser induced thermal desorption (LITD); Second harmonic generation methods; Second
harmonic generation; Metallic films
1. Introduction
Nanometer size conducting wires and complex
structures patterned over semiconductor, oxide
and metallic substrates are currently at the fore-
front of modern technology. At the same time,
basic scientific issues such as diffusion of adsor-


Source: Asscher, Micha - Institute of Chemistry, Hebrew University of Jerusalem


Collections: Chemistry